Wafer Load/Unload System for TUBE PECVD
A logistics equipment that supplies wafers to PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment facilities for Anti Reflection Coating. It is an inline equipment that takes the wafer out of the cassette magazine, mounts the wafer on a special graphite boat using an artificial robot, transfers the boat to the PECVD equipment, unloads the wafer from the boat after ARC work, and puts it back into the cassette magazine.
