Load/Unload System for ALD system
This system is a specially designed wafer loading & unloading system for ALD (Atomic Layer Deposition) process.
The trays are transferred by a unique tray transport system and the wafers are loaded & unloaded in/out the tray pocket progressively with high speed and high accuracy. Different tray sizes can be applicable and trays are well protected during transportation.
The trays are transferred by a unique tray transport system and the wafers are loaded & unloaded in/out the tray pocket progressively with high speed and high accuracy. Different tray sizes can be applicable and trays are well protected during transportation.
