Wafer Load/Unload System for Wet Process
This system is to LOAD wafers into texture etch inline system to UNLOAD wafers from each systems after process completion.
In order to properly handle PV wafers, various transporting methods such as conveyor belt, non-contact (Bernoulli) picker, delta robot pick & place types are available. And, breakage rate of cells can be detected by vision system and sorted out upon customer’s request.
In order to properly handle PV wafers, various transporting methods such as conveyor belt, non-contact (Bernoulli) picker, delta robot pick & place types are available. And, breakage rate of cells can be detected by vision system and sorted out upon customer’s request.
