Wafer transfer system(Semiconductor)
Specification.
- CAD/CAM Data down loading method
- Precise X.Y.Z-Axis Robot
- Compact structure with Air Cooling method
- Applicable various Window Glass Size
- Position control by Vision alignment (optional)
- CAD/CAM Data down loading method
- Precise X.Y.Z-Axis Robot
- Compact structure with Air Cooling method
- Applicable various Window Glass Size
- Position control by Vision alignment (optional)